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Superlok Ultra-High Purity Fittings

UHP SERIES | DIAPHRAGM VALVES

Technical Specs

Primary Connection Range:
1/4 - 1/2 " BVC
Secondary Connection Range:
Alt Primary Connection Range:
Alt Secondary Connection Range:
Pressure Rating:
145 PSI
Body Material:
Stainless - 316L - Passivated
Port Size:
Orifice Size:
4.5mm - 7.0mm
Seal Type:
Seal Material:
Seat Material:

UHP SERIES | DIAPHRAGM VALVES

Superlok's Ultra High Purity Diaphragm Valves are precision-crafted components built to meet the demanding needs of semiconductor manufacturing and high-purity industries. Designed with a hermetic seal and contamination-resistant construction, these valves deliver unparalleled purity and reliability, ensuring adherence to the highest quality standards.

These valves also feature extremely low acceptable helium leakage rates at ≤1x10-9 atm.cc/s for both internal and external values.

Related Reading

Cross Brand Part Number Look-Up

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